C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 StdTpc-Statistical Control • the statistical evaluation of

• the statistical evaluation of the particulate contamination measurement results from the analytical equipment

This standard was technically reapproved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee

HSMS는 독립적인 제조업체들이 서로에 대한 특정한 지식 없이도 연계하여 상호 운영(interoperate) 하여 생산활동을 할 수 있는 방법을 제공한다

This Specification is appended with related information to provide application examples

Characteristic parameters of these defects are part of wafer specifications (SEMI PV22)

C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 StdTpc-Statistical Control • the statistical evaluation ofglobal Gases Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org1984200211 : (Si2H6) Referenced SEMI Standards SEMI C1 Specifications for Reagents SEMI C3 Specifications for Gases