D01500 - SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method Revision:SEMI D15-1296 (Reapproved 0703) - Inactive inspection equipment

inspection equipment

The interface specified in this Standard is designed for a tool with a sealed minienvironment

This includes the coordination

a subsystem

イオン発生限度

D01500 - SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method Revision:SEMI D15-1296 (Reapproved 0703) - Inactive inspection equipmentThis method was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the Japanese FPD Materials and Components Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published December 1996. This document covers the measurement of FPD glass substrate surface waviness by