F04000 - SEMI F40 - Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing StdPbc-1021 in the order given below

in the order given below

SEMI E90-0312 (Reapproved 1218)

SEMI E133-0306 (designation  update)

SEMI E129-0709 (technical revision)

ウェーハ間のピッチを小さくするとウェーハ輸送コストが低減される。

F04000 - SEMI F40 - Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing StdPbc-1021 in the order given belowE This Standard was editorially modified in June 2022 to correct an error. A change was made to 10. 4. 2. This Practice defines preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components and neat polymer used in their manufacture. This Practice includes preparation procedures that can be applied to components such as tubing, piping, valves, regulators, fittings, gaskets, O rings,