E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) StdTpc-Device Tracking The purpose of this Standard

The purpose of this Standard is to provide a guide for a grade of trans 1

SEMI E169-0615 (technical revision)

本仕様の目的は，半導体製造設備の化学薬品（気体および液体）供給システムに使用されるステンレス鋼部品の接ガス・接液面の品質に関するスタンダードを提供することである。

a cassette that conforms to SEMI E1

SEMI E133-1218 (Reapproved 0324)

E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) StdTpc-Device Tracking The purpose of this StandardThis Standard provides a means for independent manufacturers to produce equipment and or hosts which can be connected without requiring specific knowledge of each other. The SECS I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly and