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A vessel which uses coupling (quick coupling) at its tube end (port) is excepted from the scope
The intent of this Standard is not to suggest any specific testing program but to specify the test method to be used when testing for parameters covered by this Test Method
process equipment
This Practice can be applied to make relative cost comparisons between two or more measurement gauges operating under conditions specified by the user
and pressure transducers are the types of gas distribution components that would benefit from being interchangeable
M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive A vessel which uses couplingGaAs Referenced SEMI Standards None.
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