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E04701 - SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers StdPbc-0218 SEMI E88-1104 (technical revision)

SKU: 51856093896
4.7

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Description

SEMI E88-1104 (technical revision)

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7-0304E (editorial revision)

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E04701 - SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers StdPbc-0218 SEMI E88-1104 (technical revision)NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard partially specifies the FOUPs used to transport and store 300 mm wafers in an IC manufacturing facility. 2 Scope 2. 1 This Standard is intended to set an appropriate level of specification that

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