F12000 - SEMI F120 - Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems Revision:SEMI F120-0922 - Current and the mixture 70wt% PGME/30wt%

and the mixture 70wt% PGME/30wt% PGMEA which are used as solvents in the semiconductor industry for advanced resist technology

測定機器

This Standard specifies the concepts

This Test Method also includes procedures for calibration of the apparatus for measuring both capacitance and voltage

1  The measurement methods described herein can be applied to characterize the general electrostatic charge

F12000 - SEMI F120 - Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems Revision:SEMI F120-0922 - Current and the mixture 70wt% PGME/30wt%The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing. This Test Method is an adaptation of ASTM G61 and is intended to differentiate among manufacturing processes for stainless steel that can affect the performance of the wetted surfaces. This Test Method describes a procedure, based on the