F02600 - SEMI F26 - グレード10/0.2　有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded SEMI E5-1102 (technical revision)

Name: F02600 - SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded SEMI E5-1102 (technical revision)
Brand: roaa.app
SKU: 52368093574
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SKU: 52368093574

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Description

SEMI E5-1102 (technical revision)

SEMI 3D2-1113 (technical revision)

specifically for serial identification of flatted and notched silicon wafers

This Standard stipulates materials relating to transport of 300 mm wafers using shipping boxes (FOSB) regulated by SEMI M31

SEMI G89-0211 (Reapproved 0318)

F02600 - SEMI F26 - グレード10/0.2　有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded SEMI E5-1102 (technical revision)global Gases Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org1997620033 10 0. 2 8 105 Pa 88 105 Pa 8 NH3 AsH3 PH3 Referenced SEMI Standards None.

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