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S00100 - SEMI S1 - 設備安全標籤安全基準 StdPbc-0524 2 dichloroethylene for which a

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Description

2 dichloroethylene for which a need has been identified

This Guide will aid in defining the criteria by which sealing performance can be judged in comparable measurements and seal materials can be chosen

SEMI 3D17-1217 (first published)

SEMI E63-0999 (technical revision)

7の表1に示す帯電の最大推奨レベルを決定する方法について説明する。SEMI E129にある独自の方法,およびこのガイドとSEMI E78の推奨を整合させる更新情報の両方を含んでいる。

S00100 - SEMI S1 - 設備安全標籤安全基準 StdPbc-0524 2 dichloroethylene for which aNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. Referenced SEMI Standards SEMI S10 Safety Guideline for Risk Assessment

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