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Dimethyldimethoxysilane
originally published in 1985
SEMI E83-0714 (technical revision)
SEMI E63-0600 (technical revision)
The model specified in this Specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the MFC or MFM as it appears from the network interface
C00347 - SEMI C3.47 - Specification for Hydrogen Bromide (HBr), 99.98% Quality Revision:SEMI C3.47-1011 - Superseded DimethyldimethoxysilaneThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www. semiviews. org and www. semi. org in February 2018; originally published in 1993; previously published October 2011. The purpose of this Document is to provide specifications for hydrogen bromide (HBr) that is used in the semiconductor industry. This
