G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer StdPbc-1116 • assess the agreement between

• assess the agreement between the measured

orgで入手可能となる。初版は1978年発行。前版は2005年11月発行。

SEMI E82-1106 (Reapproved 0523)

SEMI G69-0996 (Reapproved 1104)

SEMI C28-0704 (technical revision)

G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer StdPbc-1116 • assess the agreement betweenThis Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection. This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container. The