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This Specification does not address coding of wafer crystal properties that are provided in SEMI M13
SEMI MF1725-1110 (Reapproved 0322)
the price is $460 per seat (member rate)
SEMI MF1388-0707 (Reapproved 0412)
E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) StdPbc-0611 internationalPurposes of the Object Based Equipment Model include the following: Define a standard model for interfacing to multi process equipment and other complex equipment. Define standard equipment components so that communications can "discuss" component related issues. Provide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM compliant equipment to a Machine object. The purpose of the Object Based
