P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0714 注意：本文書は，編集上の修正を伴い再承認された。

注意：本文書は，編集上の修正を伴い再承認された。

The following components are expected to yield meaningful results when tested according to the present method: tubing

4-0998E (Reapproved 0703)

1  Reliability — Including mean time between failures (MTBF)

SEMI D6-0308 (technical revision)

P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0714 注意：本文書は，編集上の修正を伴い再承認された。This checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain