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SEMI E125-1104 (technical revision)
SEMI C28-0301 (technical revision)
4 This Standard can be applied to all through and blind vias as they occur in any flat surfaces made of glass
and surface positioning of the marking symbol located outside of the quality area of glass substrates for FPD use
Detailed explanation of the principles of operation and construction of the instruments used is beyond the scope of this Guide
E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-0714 - Superseded SEMI E125-1104 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)
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