MF152700 - SEMI MF1527 - Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon StdPbc-1217 This Specification is directed specifically

This Specification is directed specifically to germanium wafers with one or both sides polished

and mean work between failures (MWBF)

To ensure consistent yield control of 3DS-IC products

SEMI MF1617-0304 (technical revision)

• Halocarbon 116 (C2F6)

MF152700 - SEMI MF1527 - Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon StdPbc-1217 This Specification is directed specificallyThis Guide covers the application of certified reference materials (CRMs) for resistivity measurements on silicon wafers. Specifically, this Guide covers the use of these CRMs for preparing resistivity reference wafers and for ensuring the quality of the instrumentation used for preparing them. The Guide covers the selection of materials for resistivity reference wafers, procedures for preparing and calibrating resistivity reference wafers, and use of