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include quantitative measures of particle contribution
This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22
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C02300 - SEMI C23 - Specification for Buffered Oxide Etchants StdPbc-0623 include quantitative measures of particleThe purpose of this Specification is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation. The scope of this Specification is grades of buffered oxide etchants used in the semiconductor industry.
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