E05410 - SEMI E54.10 - Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device Revision:SEMI E54.10-0600 (Reapproved 1017) - Superseded SEMI E83-0699 (first published)

SEMI E83-0699 (first published)

Utility and Materials Used by Semiconductor Manufacturing Equipment

This guide was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the North American Flat Panel Display Committee

SEMI 3D13-0715 (Reapproved 0222)

SEMI E145 — Classification for Measurement Unit Symbols in XML

E05410 - SEMI E54.10 - Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device Revision:SEMI E54.10-0600 (Reapproved 1017) - Superseded SEMI E83-0699 (first published)An in situ particle monitor (ISPM) is a device that measures and counts particles. These devices classify by size and count, particles in the environment (gaseous, liquid, or vacuum) utilizing a technique such as detecting light from a sample region of the environments space. These counts are accumulated in bins and then reported. The number of bins varies by vendor and model. This Specification specifically addresses the minimum attributes, services,