F00900 - SEMI F9 - Test Method to Determine the Leakage Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to a Side Load Condition Revision:SEMI F9-0998 - Inactive この仕様は主に半導体処理装置に的を絞り,下記の装置型を含むが,それに限定されるものではない。
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