M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers Revision:SEMI M15-0298 - Inactive A PLHS that conforms to

A PLHS that conforms to both the prescriptive list of safety features and the design and performance criteria for those safety features is presumed to achieve a risk level of no greater than Low (as defined by SEMI S10 and SEMI S14) and

and p-type

For instance

and cassettes and that are manufactured for integration into semiconductor manufacturing equipment

This edition was approved for publication by the global Audits and Reviews Subcommittee on November 19

M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers Revision:SEMI M15-0298 - Inactive A PLHS that conforms toThis document defines the maximum number of defects, by type, that an acceptable polished Semi Insulating Gallium Arsenide (GaAs) wafer may exhibit. Referenced SEMI Standards None.