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2 This Standard defines distance factor
The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing
SEMI G82-1115 (Reapproved 1220)
This Standard provides a common basis for communication between manufacturers and users
The purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry
E13800 - SEMI E138 - 半導体生産系で共通に使われる情報の構成要素のXML表現 StdPbc-312 2 This Standard defines distanceNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Information & Control Committee2009513global Audits and Reviews Subcommittee20096www. semi. org200520093 XML ErrorData TypeDate Value TypeUnitXMLSEMI Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2
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