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silica (SiO2) for example
the columns to the right of the text designate to which flammable silicon compounds the text applies
The appropriate application of this Safety Guideline will result in a report which identifies
1 This Document establishes a Specific Equipment Model for prober equipment (PSEM)
本スタンダードは，Resist Committeeで技術的に承認されたもので，North American Microlithography Committeeが直接責任を負うものである。現版は1998年10月にNorth American Regional Standards Committeeにて承認されている。1999年2月にまずwww
E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) StdVol-Safety Guidelines silica (SiO2) for exampleNOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, 10. 4. 1, 10. 4. 1. 2, 10. 4. 1. 3, and Table 2. 1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing
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