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高信頼性で再現性の良い測定データを得るためには，本試験方法を統計的工程管理（SPC
SEMI E134-1105 (technical revision)
filters are challenged at high particle concentrations not representative of real-world conditions because current particle-detection metrology cannot detect low particle concentrations
orgで入手可能となる。初版は2010年6月発行。
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M03200 - SEMI M32 - Guide to Statistical Specifications StdPbc-0814 高信頼性で再現性の良い測定データを得るためには，本試験方法を統計的工程管理（SPCThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published September 1998; previously published July 2004. Specifications are based on requirements negotiated between trading partners. This document describes an explicit specification form that defines
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