D05300 - SEMI D53 - Specification for Flat Panel Display (FPD) Pellicles Revision:SEMI D53-0708 (Reapproved 0815) - Superseded This Standard also provides a

This Standard also provides a guide for a grade of nitric acid for which a need has been identified

1  The scope of this Standard is for grades of mixed acid etchants used in the semiconductor industry

The purpose of this Standard is to standardize requirements for n-methyl 2-pyrrolidone used in the semiconductor industry and testing procedures to support those specifications

Further information regarding UPW systems can be found in SEMI F61

It assumes that some of the critical trace contaminants (i

D05300 - SEMI D53 - Specification for Flat Panel Display (FPD) Pellicles Revision:SEMI D53-0708 (Reapproved 0815) - Superseded This Standard also provides aThis Specification defines standard stand off, transmittance, and strength of pellicle films used for masks. These dimensions apply to pellicle for masks that are principally used in fabricating flat panel displays. The mask size specifies range from 330 450 mm to 1220 1400 mm. Referenced SEMI Standards (purchase separately) SEMI D6 Specification for Liquid Crystal Display (LCD) Mask Substrates Revision History SEMI D53 0421 (technical revision) SEMI