M08100 - SEMI M81 - 単結晶シリコンカーバイド基板に存在する欠陥についてのガイド Revision:SEMI M81-0611 - Superseded Materials kinds or cleanliness are

Materials kinds or cleanliness are not defined

and microfluidic devices including valves and pumps

備註：當條文中含有「應」的字眼，表示必須與此文件要求一致。若含有「可」、「建議」、「優先」、「傾向」，或利用註與相關文件說明者，則不須完全依說明執行。

Recommendations for EPOC location

E This Safety Guideline was editorially modified in December 2023 to add Note 9 and to correct a processing error

M08100 - SEMI M81 - 単結晶シリコンカーバイド基板に存在する欠陥についてのガイド Revision:SEMI M81-0611 - Superseded Materials kinds or cleanliness areNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Compound Semiconductor Materials Global Technical Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org SEMI M55 SiCSiC SiC Referenced SEMI Standards SEMI M55 Specification for Polished