MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption StdTpc-Package Test Methods 3-0706 (first published)

3-0706 (first published)

1  The purpose of this Specification is to provide visual inspection and acceptance criteria for gas tungsten arc (GTA) welds of stainless steel and other corrosion resistant metals and alloys (CRAs) in fluid (liquid or gas) distribution systems in semiconductor manufacturing applications

polished c-axis sapphire wafers

This Standard is applicable to BLU for liquid crystal display (LCD) and the measurement includes only the optical area

本スタンダードは，300 mm径ウェーハキャリア（搬送用カセット，プロセスカセット，クォーツボート，ポッド，ロットボックス，シッピングボックスを含む）を人間工学的に設置し，正確に支持するのに使用される，自動位置決め機構であるキネマティックカプリングを規定する。これらのキネマティックカプリングは次のようなインタフェースにおいて使用される。

MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption StdTpc-Package Test Methods 3-0706 (first published)This reference Test Method covers the determination of substitutional carbon concentration in single crystal silicon. Because carbon may also reside in interstitial lattice positions when in concentrations near the solid solubility limit, the results of this Test Method may not be a measure of the total carbon concentration at such concentrations. The useful range of carbon concentration measurable by this Test Method is from the maximum amount of