E01904 - SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) Revision:SEMI E19.4-0998E (Reapproved 0709) - Superseded it is intended that the

it is intended that the concepts of terms which should be used at the technical conferences

plastic substrates

this Specification intends neither to exclude nor to limit the possibility that suppliers and end-users might test with chemicals other than UPW or with other temperature conditions and

Specifically

When SECS-II message transactions are logged using SMN

E01904 - SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) Revision:SEMI E19.4-0998E (Reapproved 0709) - Superseded it is intended that theNOTICE: SEMI E19. 4 is no longer published within the SEMI E19 family of Standards. It is published and sold separately. A standard interface is required for containers intended to control the transport environment of cassettes containing substrates. The interface must address the proper container orientation for material transfer and maintain continuity between the container and equipment environment in order to control particulate matter. This