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failure rate) as specified in the applicable SEMI E49 Subordinate Standards
SEMI E111-0117 (technical revision)
This Document covers requirements for phosphine used in the semiconductor industry
1-0303 (technical revision)
本スタンダードは，global Metrics Technical Committeeで技術的に承認されている。現版は2012年8月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年9月にwww
D07700 - SEMI D77 - Test Method for Measurements of Dimension of Films for FPD – Contour Matching Method SEMIViews failure rate) as specified inThis Standard establishes the method that evaluates with high precision a shape of the polarizing films and other films for FPD, especially non rectangle shape films. This Standard specifies the measurement method of polarizing films and other films for FPD by using contour matching method. This Standard can apply to rectangle shapes. Especially non rectangle shapes are effective. Examples of the other films except polarizing films are retardation
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