C08900 - SEMI C89 - Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS) StdDcs-Withdrawn This Guide supports the approach

This Guide supports the approach by off-line measurement of the contaminants using best available techniques available in the laboratory setting

This Standard will be helpful to unify terminologies used for backlight units

This Document covers requirements for phosphine used in the semiconductor industry

the sum of the peak height Zp and the valley depth Zv are reported

–工廠委員會之技術認可，同時也是日本平面顯示器工廠自動化委員會的直接責任。目前之版本是在2004年11月24日，由日本區標準委員會所認可。最初可在2005年1月的網址www

C08900 - SEMI C89 - Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS) StdDcs-Withdrawn This Guide supports the approachThis Document is to provide a standard of mono dispersed gold nanoparticle (GNP) challenge test for liquid filter rated below 30 nm using inductively coupled plasma mass spectroscopy (ICP MS). This Document covers a mono dispersed GNP challenge test method for below 30 nm rated liquid filter. This Document defines a test condition for mono dispersed GNP challenge test. The following areas are to be addressed in this Document: The test condition such