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originally published November 2013
a simplified version of ASTM D445 and ASTM F66 is intended for determining the kinematic viscosity of photoresists by measuring the time for a volume of liquid to flow under gravity through a calibrated glass capillary at a fixed temperature
and 100 µm (0
注意： 本文書は，2011年，全面的に書き換えられた。
SEMI T15-0818 (Reapproved 0324)
M02900 - SEMI M29 - Specification for 300 mm Shipping Box StdPbc-0921 originally published November 2013This specification was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on August 8, 2003. Initially available at www. semi. org September 2003; to be published November 2003. Originally published December 1996. This specification defines a container for safe transportation of 300 mm wafers from a
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