E05413 - SEMI E54.13 - Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) Revision:SEMI E54.13-0303 - Superseded 0%（质量分数）。

0%（质量分数）。

This has been done to establish a base for SMIF port standardization

SEMI MF1726-1110 (technical revision)

and that is designed for stability throughout all solar cell manufacturing steps

1  This Standard defines a communication specification based on the EtherNet/IPTM  (Ethernet/Industrial Protocol) network to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing tool

E05413 - SEMI E54.13 - Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) Revision:SEMI E54.13-0303 - Superseded 0%（质量分数）。* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1