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SEMI E54-0997 (technical revision - replaces SEMI E65)
The scope of this Standard is to define related functionalities which support WJ and/or WFJ
SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)
and Korean
SEMI MF1569 –– Guide for Generation of Consensus Reference Materials for Semiconductor Technology
MS00900 - SEMI MS9 - Specification for High Density Permanent Connections Between Microfluidic Devices StdTpc-Anti-Counterfeiting SEMI E54-0997 (technical revision -This Standard was technically approved by the global MEMS NEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2011. Available at www. semiviews. org and www. semi. org in June 2011. This Standard provides specification for interconnection dimensions and performance requirements for permanent microfluidic interfaces. It also provides guidance for interface design. This will help to enable low
