E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers Revision:SEMI E1.9-0701E2 - Superseded These requirements are consistent with

These requirements are consistent with the requirements of SEMI M45

This Test Method may be used for process control

SEMI M57-0305 (complete rewrite)

Two test methods are covered:

unmistakable mark that relates to both the parent brick and the individual wafer

E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers Revision:SEMI E1.9-0701E2 - Superseded These requirements are consistent withNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the cassettes used to transport and store 300 mm wafers in an IC manufacturing facility. This includes both manual and auto transport use as well as high speed extraction of the wafers in processing