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SEMI E33 — Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)
anionic and cationic)
本仕様は，プロセスツールポートに関する機械的特徴について規定し，また，ツールの前面ないし表面の特徴についても規定する。これらの特徴は，特定の機能のためであるが，特定機能のための設計要求事項を定めるものではない。このインタフェース要求事項は普遍的なものであり，ある特定の搬送様式を奨励することを避けている。
the actual wafer diameter may differ slightly due to process requirements
and also soluble in ether
D07400 - SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates StdPbc-0820 SEMI E33 — Guide forPlastic films substrates for flexible displays change their dimensions by temperature and humidity. Also their dimensions will change by time after heat treatment, water treatment, etc. This Standard provides procedures for the measurement environmental condition to measure dimensions of plastic films substrates. This Standard provides guidance for measuring dimensions of plastic films substrates for electronic devices. Referenced SEMI Standards
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