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5-0701 (first published)
SEMI C28 — Specifications and Guidelines for Hydroflouric Acid
definition and interpretation of each term provides material characteristics used for flat panel display (FPD) manufacturing
This Test Method is particularly applicable to clean
but it is not expected to be material dependent
M05500 - SEMI M55 - Specification for Polished Monocrystalline Silicon Carbide Wafers Revision:SEMI M55-0308 - Superseded 5-0701 (first published)These specifications cover substrate requirements for monocrystalline high purity silicon carbide wafers of crystallographic polytype 6H and 4H used in semiconductor and electronic device manufacturing. A complete purchase specification may require the defining of additional physical, electrical, and bulk properties. These properties are listed, together with test methods suitable for determining their magnitude where such procedures are documented.
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