M01700 - SEMI M17 - 一般的なウェーハグリッドのガイド Revision:SEMI M17-0704 - Superseded SEMI E90-0701 (technical revision)

SEMI E90-0701 (technical revision)

2  This Guide should be used in conjunction with SEMI F61 and SEMI F75

免責事項：このSEMIスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡

SEMI T3-1213 (Reapproved 0124)

The purpose of this Standard is to provide Wafer Job Object (WJOBJ) model so that the information that should be managed in conjunction with the WJ can be encapsulated in the object and can be accessed from the host

M01700 - SEMI M17 - 一般的なウェーハグリッドのガイド Revision:SEMI M17-0704 - Superseded SEMI E90-0701 (technical revision)global Silicon Wafer Committee2010827 global Audits & Reviews Subcommittee201010www. semi. org199020047 SEMI M62 Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M59 Terminology for Silicon Technology SEMI M62 Specifications for Silicon Epitaxial Wafers SEMI MF154 Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces SEMI MF1725 Practice for Analysis of