F06300 - SEMI F63 - Guide for Ultrapure Water Used in Semiconductor Processing Revision:SEMI F63-0309 - Superseded This Guide provides a framework

This Guide provides a framework for communicating specific values limiting feature levels and/or densities as agreed upon between suppliers and users

NTPv4 protocol for time synchronization is specified in this Standard because it is applicable to systems communicating by local area networks supporting multicast messaging including but not limited to Ethernet

Significance） － FPD基板のエッジは材料の仕様と利用の両方に重要である。それらは基板の製造，取り扱い，在庫そして処理の方法をもたらす。これらエッジの用語と寸法特性は，基板および製造／検査装置の製造者と使用者の両方の助けとなる。

SEMI M83-0913 (technical revision)

as defined in SEMI M59

F06300 - SEMI F63 - Guide for Ultrapure Water Used in Semiconductor Processing Revision:SEMI F63-0309 - Superseded This Guide provides a framework1 Purpose 1. 1 This Guide may be used: To establish performance criteria when purchasing ultrapure water (UPW) purification equipment. To set the process control parameters for UPW system operation. To establish quality expectations for the supplied UPW. NOTE 1: These suggested guidelines are published as technical information and are intended for informational purposes only. 1. 2 This Guide should be used in conjunction with SEMI F61 and SEMI F75.