HB01000 - SEMI HB10 - Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers Revision:SEMI HB10-1018 - Inactive SEMI M53 — Practice for

SEMI M53 — Practice for Calibrating Scanning Surface Inspection Systems using Depositions of Monodisperse Polystyrene Latex Sphere on Unpatterned Semiconductor Wafer Surfaces

5-0302 (Reapproved 0423)

This Specification provides requirements of SOI wafers

SEMI M52 — Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 5 nm Technology Generations

and electric field

HB01000 - SEMI HB10 - Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers Revision:SEMI HB10-1018 - Inactive SEMI M53 — Practice forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Sapphire has become the most popular substrate material in the HB LED industry. This Standard identifies and defines the key parameters of sapphire intended for use in manufacturing HB LED wafers. The properties of sapphire