F01200 - SEMI F12 - フッ素樹脂製フィッティングの熱サイクル負荷後のシール性能決定の試験方法 Revision:SEMI F12-0998 - Inactive 備考：本文件在

備考：本文件在

This guide document provides additional information about the Equipment Data Acquisition (EDA) SEMI Standards suite

but it may be used if it is appropriate for the specific application

This Specification covers an identification code

注意：　本文書はSEMI PR5-0699を全面的に置き換えたものである。

F01200 - SEMI F12 - フッ素樹脂製フィッティングの熱サイクル負荷後のシール性能決定の試験方法 Revision:SEMI F12-0998 - Inactive 備考：本文件在NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.