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Quantitative Measures of Compliance
as well as information and advice on performing a useful general electrostatic survey
NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard and are not intended to modify or supersede the official Standard
it distinguishes between mechanical and diffusion leak rates
SEMI F39-1223 (complete rewrite)
E10700 - SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System Revision:SEMI E107-1102 (Reapproved 0710) - Inactive Quantitative Measures of ComplianceThis Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 21, 2010. Available at www. semi. org in June 2010; originally published March 2001; previously published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive
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