G08100 - SEMI G81 - Specification for Map Data Items StdPbc-0815 SEMI A1-1020 (technical revision)

SEMI A1-1020 (technical revision)

and SEMI C12

SEMI MF673¾ Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy Current Gauge

SEMI E134-0305 (designation update)

This Specification defines the properties of silicon epitaxial wafers with buried layers that relate to the characteristics of photolithography

G08100 - SEMI G81 - Specification for Map Data Items StdPbc-0815 SEMI A1-1020 (technical revision)This Document describes the data items that relate to electronic substrate mapping. This Document applies only to substrate map data items. This Document does not address the transmission, file naming conventions, storage or archiving of substrate maps. The Specification of which data items are optional and which are required is not specified in this Document. The size of each data item described in this Document is maximum size. The actual size may