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Changes were made to Section 4
evaluating utility system enhancements
Consideration should be given to the use of this or other proposed near-edge geometry metrics as a process control tool rather than a material exchange specification
This Document defines a communication specification based on the A-LINK protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment
orgで入手可能となる。初版は2000年6月発行。前版は2007年3月発行。
F04500 - SEMI F45 - 機械加工されたステンレス鋼製異径溶接継手の仕様 StdPbc-1011 Changes were made to Sectionglobal Facilities Technical Committee2012618global Audits and Reviews Subcommittee20128www. semiviews. org www. semi. org1999620073 6. 35 mm1 4 in9. 53 mm3 8 in12. 7 mm1 2 in Referenced SEMI Standards None.
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