C00341 - SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality StdTpc-Chemical & Gas Distribution Systems 02グレード酸素バルク供給ガスに対するパーティクルの最大許容濃度を設定し，(2)その確認のための参照方法の記述である。

02グレード酸素バルク供給ガスに対するパーティクルの最大許容濃度を設定し，(2)その確認のための参照方法の記述である。

applied to all substrates

It is the responsibility of the user of these standards to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use

flammable colorless gas

Ability of the filter to retain influent particles is assessed with a particle challenge test

C00341 - SEMI C3.41 - Standard for Oxygen (O2), Bulk, 99.9998% Quality StdTpc-Chemical & Gas Distribution Systems 02グレード酸素バルク供給ガスに対するパーティクルの最大許容濃度を設定し，(2)その確認のための参照方法の記述である。This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at www. semi. org in November 2004; originally published in 1990; previously published July 2003. NOTICE: This Document was balloted and approved for withdrawal in 2004. Oxygen is a colorless, odorless, and oxidizing gas. It supports combustion. Referenced