C00333 - SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional) Revision:SEMI C3.33-92 (Reapproved 0303) - Superseded since non-planarity can lead to

since non-planarity can lead to problems in subsequent processing steps

Hydrogen chloride is shipped as a liquefied compressed gas stored under its own vapor pressure

Flat Panel Display Global Technical Committeeで技術的に承認されたもので，Japanese FPD Materials and Components Committeeが直接責任を負うものである。現版は，2003年4月28日Japanese Regional Standards Committeeにて承認されている。2003年7月にまずwww

SEMI D25 ¾ Specification for Flat Panel Display Substrate Shipping Case

This Specification applies to nitrogen contained in high pressure gas cylinders

C00333 - SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional) Revision:SEMI C3.33-92 (Reapproved 0303) - Superseded since non-planarity can lead toThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in March 2012; originally published in 1987; previously published March 2003. NOTICE: This Document was balloted and approved for withdrawal in 2011; replaced by SEMI C71, Specification and Guide for Boron