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the Standard does not specify how this actuation will take place
as considered in this Guide may include two or more wafers
This includes additional documentation recommended to support equipment installations but not directly related to EPOC’s
1 Docking Interface Port
SEMI E27-0611 (technical revision)
E14800 - SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object Revision:SEMI E148-0309E - Superseded the Standard does not specifyThe purpose of this Standard is to define the requirements for any factory component computer clock that requires synchronization of time to maintain and manage date time accurately and consistently by using a common time synchronization protocol. This Standard defines the TS Clock object for accessing factory application and equipment time value and synchronization status, describes an example of network time synchronization architecture, and
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