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本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年2月にwww
This Standard covers a definition of new recipe space named Production Recipe Cache (PRC) as one of secured recipe space in equipment
6-0421 (technical revision)
1 This Specification is part of the SEMI Sensor/Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the EtherCAT® standard
8-1103 (technical revision)
D03200 - SEMI D32 - Specification for Improved Information Management for Glass FPD Substrates Through Orientation Corner Unification StdVol-Equipment Automation Software 本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年12月24日，global AuditsThis Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www. semi. org in July 2009; originally published March 2003. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety
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