C04600 - SEMI C46 - Guide for 25% Tetramethylammonium Hydroxide Revision:SEMI C46-0699 - Superseded 4 This Standard can be

4  This Standard can be applied to all through and blind vias as they occur in any flat surfaces made of glass

The purpose of this Document is to provide a guide for tris(dimethylamino) silane (3DMAS) for which a need has been identified

本スタンダードは，フラットパネルディスプレイ製品の再生産性およびすべてのベンダーが出荷するガラス基板の均一性を確保するために，ガラス基板に関する一定レベルの仕様を設けることを目的とする。また，本スタンダードにより，搬送装置およびカセット，製造装置内部のすべての機械的インタフェースの互換性も確保される。

Where an analytical procedure different from that provided is substituted by a supplier or user

Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1)

C04600 - SEMI C46 - Guide for 25% Tetramethylammonium Hydroxide Revision:SEMI C46-0699 - Superseded 4 This Standard can beThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in August 2012; originally published in 1991; previously published March 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not