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SEMI E128-0524 (technical revision)
The user of an MFC can use the data generated by this method to evaluate the impact of steady-state supply voltage variations on the MFC’s ability to deliver set point flow values
orgで入手可能となる。初版は1986年発行。前版は1987年発行。
1 Docking Interface Port
including jigs and some consumable materials
G09000 - SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes StdPbc-1113 SEMI E128-0524 (technical revision)The purpose of this Standard is to standardize the specifications for 300 mm wafer coin stack type shipping container used for test and packaging processes for wafers. This Specification defines the dimensions of container (refer to 5. 1. 1) and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers
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