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orgで入手可能となる。初版は2006年7月出版。
SEMI E6-96 (technical revision)
1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization
form a complete interoperability Standard
SEMI E63-1104 (technical revision)
P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdPbc-0308 orgで入手可能となる。初版は2006年7月出版。This guideline was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1992. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain
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