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SEMI MF523-1107 (Reapproved 1012)
capacity ramp
orgで入手可能となる。2011年11月発行に至る。初版は1995年発行。
SEMI E28-0218 (technical revision)
to be published July 2004
E05408 - SEMI E54.8 - Specification for Sensor/Actuator for Network Communications for PROFIBUS-DP Revision:SEMI E54.8-0305 - Superseded SEMI MF523-1107 (Reapproved 1012)This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 19, 2008. It was available at www. semi. org in February 2009. Originally published September 1999; previously published March 2005. NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately. This
