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SEMI C33-0213 (technical revision)
SEMI C36-0301 (technical revision)
SEMI 3D4-0924 (technical revision)
SEMI C36-0200 (technical revision)
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C00305 - SEMI C3.5 - Standard for Nitrogen (N2), Bulk Liquid, 99.998% Quality StdTier-Tier0 SEMI C33-0213 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15, 1999. Available at www. semi. org in September 1999; originally published in 1981; previously published in 1993. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas
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